All-dry photoresist systems: physical vapor deposition of molecular glasses

Frauke Pfeiffer; Christian Neuber; Hans-Werner Schmidt

doi:10.1117/12.771101

26 March 2008 All-dry photoresist systems: physical vapor deposition of molecular glasses

Frauke Pfeiffer, Christian Neuber, Hans-Werner Schmidt

Proceedings Volume 6923, Advances in Resist Materials and Processing Technology XXV; 69231F (2008) https://doi.org/10.1117/12.771101
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

The aim of the paper is the development of an all-dry photolithographic process in which the film preparation step as well as the development step is performed without the use of solvent. To implement an all-dry photoresist system we focused on coumarin derivatives, as this class can be photodimerized in the solid state and features sufficient high thermal stability. The dimerized product exhibits sufficiently different physical properties. The monomer can be evaporated at elevated temperatures whereas the dimerized product remains non-volatile under these conditions. With a tailored glass forming coumarin derivative we demonstrated the capability to develop clear patterns. A combinatorial approach, i.e. producing a compositional library in combination with the variation of exposure dose was utilized to efficiently optimize the all-dry photoresist system.

Citation Download Citation

Frauke Pfeiffer, Christian Neuber, and Hans-Werner Schmidt "All-dry photoresist systems: physical vapor deposition of molecular glasses", Proc. SPIE 6923, Advances in Resist Materials and Processing Technology XXV, 69231F (26 March 2008); https://doi.org/10.1117/12.771101

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available