Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process

Yi-Chang Chen; Shu-Ping Dong; Chun-Chieh Wang; Shih Hsuan Kuo; Wei Cheng Wang; Hung-Ming Tai

doi:10.1117/12.860565

24 August 2010 Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process

Yi-Chang Chen, Shu-Ping Dong, Chun-Chieh Wang, Shih Hsuan Kuo, Wei Cheng Wang, Hung-Ming Tai

Proceedings Volume 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV; 77670P (2010) https://doi.org/10.1117/12.860565
Event: SPIE NanoScience + Engineering, 2010, San Diego, California, United States

Abstract

The in-situ measurements for continuously rolling optical films by the chromatic confocal apparatus have been successfully achieved by the authors. The apparatus presented here consists of chromatic confocal to avoid the vibrations caused by the roller machine while working. Without the need of the vertical z axis scan, chromatic confocal can give instant thickness measurements. Therefore, the apparatus possesses the characters of high resolution and fast response. We believe that this system can highly monitor and improve the yield rate in production lines.

Citation Download Citation

Yi-Chang Chen, Shu-Ping Dong, Chun-Chieh Wang, Shih Hsuan Kuo, Wei Cheng Wang, and Hung-Ming Tai "Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process", Proc. SPIE 7767, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, 77670P (24 August 2010); https://doi.org/10.1117/12.860565

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