Paper
24 September 2010 Defect reduction through Lean methodology
Kathleen Purdy, Louis Kindt, Jim Densmore, Craig Benson, Nancy Zhou, John Leonard, Cynthia Whiteside, Robert Nolan, David Shanks
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Abstract
Lean manufacturing is a systematic method of identifying and eliminating waste. Use of Lean manufacturing techniques at the IBM photomask manufacturing facility has increased efficiency and productivity of the photomask process. Tools, such as, value stream mapping, 5S and structured problem solving are widely used today. In this paper we describe a step-by-step Lean technique used to systematically decrease defects resulting in reduced material costs, inspection costs and cycle time. The method used consists of an 8-step approach commonly referred to as the 8D problem solving process. This process allowed us to identify both prominent issues as well as more subtle problems requiring in depth investigation. The methodology used is flexible and can be applied to numerous situations. Advantages to Lean methodology are also discussed.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kathleen Purdy, Louis Kindt, Jim Densmore, Craig Benson, Nancy Zhou, John Leonard, Cynthia Whiteside, Robert Nolan, and David Shanks "Defect reduction through Lean methodology", Proc. SPIE 7823, Photomask Technology 2010, 78231Y (24 September 2010); https://doi.org/10.1117/12.864524
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KEYWORDS
Manufacturing

Pellicles

Photomasks

Inspection

Visualization

Bone

Failure analysis

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