Application of photoelectric autocollimator in detecting position precision of NC motorized stage

Bixi Yan; Qimeng Tan; Naiguang Lv

doi:10.1117/12.869820

11 November 2010 Application of photoelectric autocollimator in detecting position precision of NC motorized stage

Bixi Yan, Qimeng Tan, Naiguang Lv

Proceedings Volume 7855, Optical Metrology and Inspection for Industrial Applications; 78551K (2010) https://doi.org/10.1117/12.869820
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

A photoelectric autocollimator, which consists of an optical autocollimator and an area CCD and whose standard deviation is less than 0.5" calibrated by a dual-frequency laser interferometer HP5528A, is proposed in the paper. The positional precision of a NC motorized stage is detected automatically and quickly by applying the photoelectric autocollimator calibrated and an optical polyhedron to finish the error compensation of the stage. According to GB/T 17421.2-2000, when the polyhedron and the stage both revolve with the same axis, the positional error of the stage is measured by the photoelectric autocollimator and then sent back to the controlling system of the stage manually or automatically. Experimental results show that an angle can be measured by the photoelectric autocollimator and the calculated position accuracy agrees with that which is measured by a Triangle autocollimator 500-57 at the same time.

Citation Download Citation

Bixi Yan, Qimeng Tan, and Naiguang Lv "Application of photoelectric autocollimator in detecting position precision of NC motorized stage", Proc. SPIE 7855, Optical Metrology and Inspection for Industrial Applications, 78551K (11 November 2010); https://doi.org/10.1117/12.869820

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