The machining precision analysis of the ion beam figuring system

Tingwen Xing; Yun Li; Xin Jia; Jiajun Xu

doi:10.1117/12.903773

15 November 2011 The machining precision analysis of the ion beam figuring system

Tingwen Xing, Yun Li, Xin Jia, Jiajun Xu

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210N (2011) https://doi.org/10.1117/12.903773
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The ion beam figuring machine is a kind of high precise machining facility for optical components. In the field of optical fabrication, the machining precision is always an important capability for the machining facility. The basic structures and working principles of the ion beam figuring system are primarily introduced. And then, various errors which may reduce the final machining precision have been analyzed through theories analysis and computer simulations. The errors include: the approximate error from the discrete compute model to the actual continuum machining model; the system error and random error of the high precision 3-axis motion stage which drives the ion source; the system error and random error of the material removal rate of the ion source. A set of potential error parameters has been given for each part of the ion beam figuring system. By using this set of parameters, it is possible to reach the nano-level machining. The precision analysis in the paper will be a reference for ion beam figuring.

Citation Download Citation

Tingwen Xing, Yun Li, Xin Jia, and Jiajun Xu "The machining precision analysis of the ion beam figuring system", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210N (15 November 2011); https://doi.org/10.1117/12.903773

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Ion beams

Ions

Error analysis

Motion models

Photovoltaics

Computing systems

Computer simulations

Show All Keywords

Keywords/Phrases

Search In:

Publication Years