Prof. Tingwen Xing Profile

Prof. Tingwen Xing

at Institute of Optics and Electronics CAS

SPIE Involvement:

Author | Editor

Publications (63)

SPIE Journal Paper | 23 February 2018

Wavefront-aberration measurement and systematic-error analysis of a high numerical-aperture objective

Zhixiang Liu, Tingwen Xing, Yadong Jiang, Baobin Lv

OE, Vol. 57, Issue 02, 024107, (February 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.2.024107

KEYWORDS: Wavefronts, Sensors, Diffraction gratings, Error analysis, Diffraction, Wavefront aberrations, Distortion, Calibration, Fourier transforms, Manufacturing

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SPIE Journal Paper | 20 February 2018

Design of large zoom ratio long-wave infrared zoom system with compound zoom method

Cao Chao, Zhiyuan Liao, Bai Yu, Tingwen Xing

OE, Vol. 57, Issue 02, 025104, (February 2018) https://doi.org/10.1117/12.10.1117/1.OE.57.2.025104

KEYWORDS: Zoom lenses, Infrared zoom, Chemical elements, Content addressable memory, Differential equations, Optical engineering, Modulation transfer functions, Chaos, Image quality, Infrared radiation

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Proceedings Article | 16 October 2017 Paper

Etching hard brittle optical materials by masked ion beam

Yun Li, Taotao Fu, Xin Jia, Tingwen Xing

Proceedings Volume 10448, 1044809 (2017) https://doi.org/10.1117/12.2279664

KEYWORDS: Etching, Aspheric lenses, Ion beams, Ions, Aspheric optics, Surface finishing, Spherical lenses, Mirrors, Glasses, Sapphire

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Proceedings Article | 28 October 2016 Paper

Athermal design for mid-wave infrared lens with long EFFL

Yu Bai, Tingwen Xing

Proceedings Volume 9683, 96830T (2016) https://doi.org/10.1117/12.2246259

KEYWORDS: Mid-IR, Optical design, Infrared radiation, Infrared imaging, Thermography, Temperature metrology, Image quality, Modulation transfer functions, Refractive index, Infrared detectors

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Proceedings Article | 25 October 2016 Paper

Design and simulation of large field plate lithography lens

Chao Deng, Tingwen Xing, Wumei Lin, Xianchang Zhu

Proceedings Volume 9685, 96850V (2016) https://doi.org/10.1117/12.2245717

KEYWORDS: Lithography, Tolerancing, Error analysis, Distortion, Monte Carlo methods, Lens design, Modulation transfer functions, Diffraction, Monochromatic aberrations, Image quality

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Proceedings Article | 27 September 2016 Paper

The analysis of measurement accuracy of the parallel binocular stereo vision system

Huan Yu, Tingwen Xing, Xin Jia

Proceedings Volume 9684, 96841I (2016) https://doi.org/10.1117/12.2243156

KEYWORDS: Stereo vision systems, Cameras, Error analysis, Visual process modeling, MATLAB, 3D image processing, Imaging systems, 3D acquisition, Target recognition, Device simulation

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Proceedings Article | 27 September 2016 Presentation + Paper

Applying Q-type aspheres in the ultraviolet lithography objective lens

Yu Bai, Tingwen Xing, Yadong Jiang

Proceedings Volume 9948, 994804 (2016) https://doi.org/10.1117/12.2235896

KEYWORDS: Lithography, Ultraviolet radiation, Objectives, Aspheric lenses, Lens design, Silica, Modulation transfer functions, Optical design, Optics manufacturing, Wavefronts

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Proceedings Article | 27 September 2016 Paper

Analysis of absolute flatness testing in sub-stitching interferometer

Xin Jia, Fuchao Xu, Weimin Xie, Tingwen Xing

Proceedings Volume 9684, 968438 (2016) https://doi.org/10.1117/12.2243462

KEYWORDS: Interferometers, Control systems, Environmental sensing, Humidity, Optical testing, Active isolation, Zoom lenses, Error control coding, Motion controllers, Autocollimators

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Proceedings Article | 24 September 2015 Paper

Two-dimension lateral shearing interferometry with dual-mode

Zhixiang Liu, Tingwen Xin, Yadong Jiang, Baobin Lv, Fuchao Xu

Proceedings Volume 9628, 962817 (2015) https://doi.org/10.1117/12.2189878

KEYWORDS: Wavefronts, Phase shifting, Fourier transforms, Diffraction, Diffraction gratings, Interferometry, Objectives, Shearing interferometers, Microscopes, Optical design

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Proceedings Article | 24 September 2015 Paper

Absolute testing of flats in sub-stitching interferometer by rotation-shift method

Xin Jia, Fuchao Xu, Weimin Xie, Yun Li, Tingwen Xing

Proceedings Volume 9628, 962819 (2015) https://doi.org/10.1117/12.2191288

KEYWORDS: Interferometers, Testing and analysis, Control systems, Error analysis, Zernike polynomials, Humidity, Environmental sensing, Optical testing, Zoom lenses, Active isolation

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Proceedings Article | 19 February 2015 Paper

Absolute testing of surface based on sub-aperture stitching interferometry

Xin Jia, Fuchao Xu, Weimin Xie, Tingwen Xing

Proceedings Volume 9449, 944933 (2015) https://doi.org/10.1117/12.2081125

KEYWORDS: Reflectivity, Interferometers, Testing and analysis, Stitching interferometry, Standards development, Wavefronts, Optical components, High power lasers, Laser systems engineering, Astronomy

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Proceedings Article | 5 November 2014 Paper

Two-dimension lateral shearing interferometry for microscope objective wavefront metrology

Zhixiang Liu, Tingwen Xing, Yadong Jiang, Baobin Lv, Fuchao Xu

Proceedings Volume 9272, 92721B (2014) https://doi.org/10.1117/12.2071500

KEYWORDS: Wavefronts, Diffraction gratings, Microscopes, Objectives, Diffraction, Shearing interferometers, Fourier transforms, Interferometry, Zernike polynomials, Wavefront metrology

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Proceedings Article | 18 September 2014 Paper

Design of twin computer-generated hologram for absolute testing of aspheric surfaces

Jie Feng, Chao Deng, Tingwen Xing

Proceedings Volume 9282, 92821M (2014) https://doi.org/10.1117/12.2068507

KEYWORDS: Aspheric lenses, Spherical lenses, Computer generated holography, Mirrors, Optical design, Holograms, Calibration, Code v, Interferometry, Diffraction

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Proceedings Article | 18 September 2014 Paper

Aberration functions expanding in Zernike polynomial for lithographic lens

Huang Yang, Hongwei Zhu, Tingwen Xing

Proceedings Volume 9282, 928233 (2014) https://doi.org/10.1117/12.2068275

KEYWORDS: Zernike polynomials, Lithography, Wavefronts, Manufacturing, 193nm lithography, Optics manufacturing, Wavefront aberrations, Code v, Optical design, Shape analysis

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Proceedings Article | 18 September 2014 Paper

The impact of polarization on grating performance of the lateral shearing interferometer

Zhengpeng Yao, Xuefeng Liu, Tingwen Xing

Proceedings Volume 9282, 92822J (2014) https://doi.org/10.1117/12.2068814

KEYWORDS: Diffraction gratings, Polarization, Diffraction, Shearing interferometers, Finite-difference time-domain method, Phase shifts, Magnetism, Interferometers, Neptunium, Electromagnetism

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Proceedings Article | 18 September 2014 Paper

Source optimization using simulated annealing algorithm

Haibo Jiang, Tingwen Xing, Meng Du

Proceedings Volume 9282, 928239 (2014) https://doi.org/10.1117/12.2069398

KEYWORDS: Nanoimprint lithography, Algorithms, Optimization (mathematics), Lithographic illumination, Image quality, Lithography, Objectives, Photomasks, Critical dimension metrology, Semiconducting wafers

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Proceedings Article | 8 September 2014 Paper

Dynamic compensation for the lithographic object lens

Hongwei Zhu, Tingwen Xing, Zexiang Chen

Proceedings Volume 9195, 91950P (2014) https://doi.org/10.1117/12.2060302

KEYWORDS: Lithography, Wavefronts, Image quality, Manufacturing, Zernike polynomials, Metrology, Distortion, Optical fabrication equipment, Device simulation, Wavefront aberrations

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Proceedings Article | 2 September 2014 Paper

Athermal design for infrared refractive, diffractive, reflective hybrid optical system

Ximin Cheng, Weimin Xie, Yu Bai, Xin Jia, Tingwen Xing

Proceedings Volume 9280, 928018 (2014) https://doi.org/10.1117/12.2068585

KEYWORDS: Infrared radiation, Infrared imaging, Mirrors, Thermography, Temperature metrology, Optical design, Image quality, Optical components, Diffractive optical elements, Modulation transfer functions

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Proceedings Article | 21 August 2014 Paper

A hybrid algorithm for the design of diffractive optical element for beam shaping

Kewei Yin, Zhiqiang Huang, Wumei Lin, Tingwen Xing

Proceedings Volume 9283, 92830Z (2014) https://doi.org/10.1117/12.2067853

KEYWORDS: Diffractive optical elements, Beam shaping, Algorithms, Optical design, Optimization (mathematics), Detection and tracking algorithms, Diffraction, Numerical simulations, Modulation, Wave propagation

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Proceedings Article | 18 August 2014 Paper

Experiment analysis of freeform testing based on absolute testing method

Xin Jia, Fuchao Xu, Tingwen Xing

Proceedings Volume 9203, 920315 (2014) https://doi.org/10.1117/12.2060496

KEYWORDS: Testing and analysis, Wavefronts, Zernike polynomials, Aspheric lenses, Lithography, Photovoltaics, Humidity, Optical testing, Polishing, Interferometers

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Proceedings Article | 6 August 2014 Paper

Design of MWIR step-zoom detection imaging system with a large FPA

Yu Bai, Tingwen Xing, Wumei Lin, Yadong Jiang

Proceedings Volume 9281, 92810Z (2014) https://doi.org/10.1117/12.2069583

KEYWORDS: Staring arrays, Imaging systems, Modulation transfer functions, Diffraction, Mid-IR, Infrared detectors, Modulation, Temperature metrology, Image quality, Optical design

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Proceedings Article | 6 August 2014 Paper

Selection of the compensation quantity to the lens deformation caused by gravity

Lijuan Yang, Tingwen Xing

Proceedings Volume 9281, 92811G (2014) https://doi.org/10.1117/12.2067970

KEYWORDS: Optics manufacturing, Finite element methods, Design for manufacturability, Lens design, Surface finishing, Ions, Photovoltaics, Spherical lenses, Optical signal processing, Scientific research

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Proceedings Article | 15 October 2013 Paper

Absolute testing of freeform lens

Xin Jia, Tingwen Xing

Proceedings Volume 8884, 888429 (2013) https://doi.org/10.1117/12.2029187

KEYWORDS: Prisms, Testing and analysis, Zernike polynomials, Spatial frequencies, Wavefronts, Freeform optics, Optical testing, Optical design, Polishing, Surface finishing

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Proceedings Article | 30 August 2013 Paper

Design of an infrared three-mirror optical system with large relative aperture

Yu Bai, Sheng Liao, Hua Li, Tingwen Xing, Yadong Jiang

Proceedings Volume 8910, 891009 (2013) https://doi.org/10.1117/12.2031691

KEYWORDS: Infrared imaging, Infrared radiation, Mirrors, Modulation transfer functions, Reflectivity, Image quality, Distortion, Imaging systems, Optical design, Long wavelength infrared

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Proceedings Article | 23 August 2013 Paper

Vector analysis of two-dimensional Ronchi grating in the metrology system

Zhengpeng Yao, Tingwen Xing

Proceedings Volume 8911, 89110J (2013) https://doi.org/10.1117/12.2034499

KEYWORDS: Diffraction gratings, Diffraction, Wavefronts, Ronchi rulings, Shearing interferometers, Dielectric polarization, Metrology, Lithography, Sensors, Dielectrics

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Proceedings Article | 23 August 2013 Paper

Error analysis for aspheric surface testing system

Jie Feng, Chao Deng, Tingwen Xing

Proceedings Volume 8911, 89110V (2013) https://doi.org/10.1117/12.2034884

KEYWORDS: Computer generated holography, Wavefronts, Error analysis, Optical fabrication, Etching, Distortion, Diffraction, Diffraction gratings, Surface roughness, Aspheric lenses

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Proceedings Article | 23 August 2013 Paper

Illumination optimization in optical projective lithography

Hai-bo Jiang, Ting-wen Xing, Meng Du, An Chen

Proceedings Volume 8911, 89110R (2013) https://doi.org/10.1117/12.2034697

KEYWORDS: Lithographic illumination, Optimization (mathematics), Lithography, Photomasks, Objectives, Image quality, Semiconducting wafers, Numerical analysis, Resolution enhancement technologies, Source mask optimization

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Proceedings Article | 23 August 2013 Paper

Study of the impact of gas temperature and pressure on image quality of lithography objective lens

Chao Zhou, Tingwen Xing

Proceedings Volume 8911, 89110M (2013) https://doi.org/10.1117/12.2034543

KEYWORDS: Refractive index, Monochromatic aberrations, Objectives, Wavefronts, Nitrogen, Lithography, Image quality, Patents, Photovoltaics, Temperature metrology

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SPIE Journal Paper | 24 June 2013 Open Access

Spherical aberrations and manufacturing errors in eliminating the substrate errors of a computer-generated hologram (withdrawn)

Jie Feng, Chao Deng, Tingwen Xing

OE, Vol. 52, Issue 09, 091723, (June 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.9.091723

KEYWORDS: Computer generated holography, Monochromatic aberrations, Optics manufacturing, Error analysis, Manufacturing, Chaos, Electronics, Optical design, Holograms, Optical engineering

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Proceedings Article | 13 May 2013 Paper

Design and location deviation of the computer generated holograms used for aspheric surface testing

Jie Feng, Chao Deng, Tingwen Xing

Proceedings Volume 8788, 87882O (2013) https://doi.org/10.1117/12.2019864

KEYWORDS: Computer generated holography, Aspheric lenses, Mirrors, Aspheric optics, Wavefronts, Optical alignment, Holograms, Optical design, Distortion, Interferometry

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Proceedings Article | 13 May 2013 Paper

Absolute testing of flats with all terms by using even and odd functions

Xin Jia, Fuchao Xu, Tingwen Xing, Zhixiang Liu

Proceedings Volume 8789, 878911 (2013) https://doi.org/10.1117/12.2019722

KEYWORDS: Prisms, Zernike polynomials, Optical testing, Error analysis, Testing and analysis, Interferometry, Electronics, Metrology, Spatial frequencies, Phase shifting

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Proceedings Article | 13 May 2013 Paper

A compensation method of large aperture optical lens for gravity deformation

Lijuan Yang, Tingwen Xing, Jie Feng

Proceedings Volume 8788, 87882K (2013) https://doi.org/10.1117/12.2020113

KEYWORDS: Optics manufacturing, Finite element methods, Distortion, Design for manufacturability, Spherical lenses, Imaging systems, Optical components, Shape analysis, Optical testing, Wavefronts

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Proceedings Article | 13 May 2013 Paper

The impact of polarization on metrology performance of the lateral shearing interferometer

Zhengpeng Yao, Tingwen Xing

Proceedings Volume 8788, 87882F (2013) https://doi.org/10.1117/12.2020253

KEYWORDS: Polarization, Wavefronts, Metrology, Shearing interferometers, Lithography, Diffraction gratings, Diffraction, Sensors, Wavefront aberrations, Interferometers

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Proceedings Article | 12 April 2013 Paper

Wavefront testing of pinhole based on point diffraction interferometer

Xin Jia, Tingwen Xing, Jiajun Xu, Wumei Lin, Zhijie Liao

Proceedings Volume 8683, 86832F (2013) https://doi.org/10.1117/12.2011429

KEYWORDS: Wavefronts, Point diffraction interferometers, Interferometers, Phase shifts, Testing and analysis, Optical testing, Beam splitters, Charge-coupled devices, Phase shifting, CCD image sensors

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Proceedings Article | 16 October 2012 Paper

Preferential sputtering of Ar ion processing SiO2 mirror

Guping Duan, Tingwen Xing, Yun Li

Proceedings Volume 8416, 84162L (2012) https://doi.org/10.1117/12.973697

KEYWORDS: Sputter deposition, Ions, Silicon, Ion beams, Argon, Silica, Chemical species, Mirrors, Solids, Tin

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