Vision-guidance of micro- and nanorobots

T. Wortmann; C. Dahmen; S. Fatikow

doi:10.1117/12.917420

15 November 2011 Vision-guidance of micro- and nanorobots

T. Wortmann, C. Dahmen, S. Fatikow

Proceedings Volume 8335, 2012 International Workshop on Image Processing and Optical Engineering; 83351J (2011) https://doi.org/10.1117/12.917420
Event: 2012 International Workshop on Image Processing and Optical Engineering, 2012, Harbin, China

Abstract

This paper presents a selection of image processing methods and algorithms, which are needed to enable the reliable automation of robotic tasks at the micro and nanoscale. Application examples are automatic assembly of new nanoscale electronic elements or automatic testing of material properties. Due to the very small object dimensions targeted here, the scanning electron microscope is the appropriate image sensor. The methods described in this paper can be categorized into procedures of object recognition and object tracking. Object recognition deals with the problem of finding and labeling nanoscale objects in an image scene, whereas tracking is the process of continuously following the movement of a specific object. Both methods carried out subsequently enable fully automated robotic tasks at the micro- and nanoscale. A selection of algorithms is demonstrated and found suitable.

Citation Download Citation

T. Wortmann, C. Dahmen, and S. Fatikow "Vision-guidance of micro- and nanorobots", Proc. SPIE 8335, 2012 International Workshop on Image Processing and Optical Engineering, 83351J (15 November 2011); https://doi.org/10.1117/12.917420

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