Dr. Sergej Fatikow Profile

Dr. Sergej Fatikow

at Carl von Ossietzky Univ Oldenburg

SPIE Involvement:

Author

Proceedings Article | 15 November 2011 Paper

Vision-guidance of micro- and nanorobots

T. Wortmann, C. Dahmen, S. Fatikow

Proceedings Volume 8335, 83351J (2011) https://doi.org/10.1117/12.917420

KEYWORDS: Scanning electron microscopy, Image processing, Object recognition, Detection and tracking algorithms, Nanorobotics, Sensors, Robotics, Control systems, Image sensors, Electron microscopes

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Proceedings Article | 17 November 2008 Paper

Flexible visual feedback for automated nanohandling inside an SEM

S. Fatikow, D. Jasper, C. Edeler, C. Dahmen

Proceedings Volume 7266, 72660X (2008) https://doi.org/10.1117/12.807090

KEYWORDS: Cameras, Actuators, Sensors, Scanning electron microscopy, Detection and tracking algorithms, Computer programming, Imaging systems, Image processing, Prototyping, Visualization

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Proceedings Article | 8 October 2007 Paper

Control system for an AFM based nanomanipulation station

Florian Krohs, Saskia Hagemann, Jorge Otero, Manel Puig-Vidal, Sergej Fatikow

Proceedings Volume 6719, 67190N (2007) https://doi.org/10.1117/12.754589

KEYWORDS: Sensors, Atomic force microscopy, Control systems, Robots, Nanomanipulation, Actuators, Microscopes, Image resolution, Optical microscopes, Imaging systems

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Proceedings Article | 8 October 2007 Paper

CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback

Daniel Jasper, Sergej Fatikow

Proceedings Volume 6719, 67190M (2007) https://doi.org/10.1117/12.754585

KEYWORDS: Cameras, Scanning electron microscopy, Microscopes, Actuators, Image processing, Control systems, Visualization, Sensors, Distance measurement, Detection and tracking algorithms

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Proceedings Article | 15 May 2007 Paper

Development of automated microrobot-based nanohandling stations for nanocharacterization

Sergej Fatikow, Volkmar Eichhorn, Florian Krohs, Iulian Mircea, Christian Stolle, Saskia Hagemann

Proceedings Volume 6589, 65891H (2007) https://doi.org/10.1117/12.715630

KEYWORDS: Sensors, Atomic force microscopy, Scanning electron microscopy, Control systems, Carbon nanotubes, Calibration, Optical microscopes, Computer architecture, Microscopes, Nanorobotics

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Proceedings Article | 17 October 2006 Paper

Reference pattern-based 2D measurement with nano resolution

Zuobin Wang, Shizhong Su, Yury Konstantinovich Verevkin, Sergej Fatikow

Proceedings Volume 6376, 63760M (2006) https://doi.org/10.1117/12.685924

KEYWORDS: Lithography, Manufacturing, Image processing, Packaging, Statistical analysis, Scanning electron microscopy, Nanotechnology, 193nm lithography, Optical lithography, Fringe analysis

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Proceedings Article | 13 October 2006 Paper

Vision feedback in an automatic nanohandling station inside an SEM

Torsten Sievers, Marco Jähnisch, Christian Schrader, Sergej Fatikow

Proceedings Volume 6376, 63760B (2006) https://doi.org/10.1117/12.684178

KEYWORDS: Scanning electron microscopy, Image processing, Sensors, Visualization, Volume rendering, Detection and tracking algorithms, Image acquisition, Silicon, Microscopes, Nanowires

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Proceedings Article | 14 November 2002 Paper

Smart materials for actuation in microrobots

Axel Kortschack, Sergej Fatikow

Proceedings Volume 4935, (2002) https://doi.org/10.1117/12.471982

KEYWORDS: Actuators, Ceramics, Magnetism, Particles, Optical spheres, Smart materials, Robots, Scanning electron microscopy, Ruby, Haptic technology

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Proceedings Article | 8 October 2001 Paper

AFM-based force microsensor for a microrobot

Sergej Fatikow, Stephan Fahlbusch

Proceedings Volume 4568, (2001) https://doi.org/10.1117/12.444116

KEYWORDS: Sensors, Robots, Scanning electron microscopy, Control systems, Human-machine interfaces, Microsensors, Computing systems, Actuators, Wheatstone bridges, Visualization

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Proceedings Article | 11 October 2000 Paper

Development of a microrobot-based micromanipulation cell in a scanning electron microscope (SEM)

Ferdinand Schmoeckel, Stephan Fahlbusch, Joerg Seyfried, Axel Buerkle, Sergej Fatikow

Proceedings Volume 4194, (2000) https://doi.org/10.1117/12.403693

KEYWORDS: Scanning electron microscopy, Electron microscopes, Robots, Prototyping, Electron beams, Microsystems, Mobile robots, Automatic control

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Proceedings Article | 22 June 2000 Paper

Smart flexible microrobots for scanning electron microscope (SEM) applications

Ferdinand Schmoeckel, Sergej Fatikow

Proceedings Volume 3985, (2000) https://doi.org/10.1117/12.388818

KEYWORDS: Scanning electron microscopy, Robots, Microscopes, Control systems, Electron beams, Light emitting diodes, Sensors, Electron microscopes, CCD cameras, Computing systems

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Proceedings Article | 18 August 1999 Paper

Automatic control system of a microrobot-based microassembly station using computer vision

Sergej Fatikow, Axel Buerkle, Joerg Seyfried

Proceedings Volume 3834, (1999) https://doi.org/10.1117/12.357820

KEYWORDS: Light emitting diodes, Sensors, Control systems, Microscopes, Cameras, Computing systems, Microsystems, Scanning electron microscopy, Visualization, Human-machine interfaces

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Proceedings Article | 5 October 1998 Paper

Planning and control of a microassembly process in a flexible microrobot-based desktop station

Sergej Fatikow, Karoly Santa

Proceedings Volume 3519, (1998) https://doi.org/10.1117/12.325746

KEYWORDS: Control systems, Systems modeling, Microsystems, Nondestructive evaluation, Prototyping, Piezoelectric driven mechanisms, Computer aided design, Solid modeling, Computer simulations

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Proceedings Article | 1 January 1998 Paper

Design and control of flexible microrobots for an automated microassembly desktop station

Sergej Fatikow, Ulrich Rembold, Heinz Woern

Proceedings Volume 3202, (1998) https://doi.org/10.1117/12.298046

KEYWORDS: Robots, Microsystems, Prototyping, Motion controllers, Microscopes

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Proceedings Article | 11 December 1996 Paper

Automated micromanipulation desktop station based on mobile piezoelectric microrobots

Sergej Fatikow

Proceedings Volume 2906, (1996) https://doi.org/10.1117/12.260630

KEYWORDS: Robots, Control systems, Sensors, Microscopes, Microsystems, Computing systems, Glasses, Robotic systems, Metals, Scanning electron microscopy

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Showing 5 of 15 publications

SPIE Conference Volume | 8 October 2007

Optomechatronic Systems Control III

Conference Committee Involvement (1)

Optomechatronic Systems Control III

8 October 2007 | Lausanne, Switzerland

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