Fuzzy pattern matching techniques for photomask layout data

Kokoro Kato; Yoshiyuki Taniguchi; Kuninori Nishizawa

doi:10.1117/12.2027851

28 June 2013 Fuzzy pattern matching techniques for photomask layout data

Kokoro Kato, Yoshiyuki Taniguchi, Kuninori Nishizawa

Proceedings Volume 8701, Photomask and Next-Generation Lithography Mask Technology XX; 87010C (2013) https://doi.org/10.1117/12.2027851
Event: Photomask and NGL Mask Technology XX, 2013, Yokohama, Japan

Abstract

Pattern matching seems to be promising technique to the mask industry. It can be used for many applications such as hot spot detection of post-OPC data, search of AIMS reference location or CDSEM measurement point extraction. In particular, fuzzy pattern matching is more needed for mask data processing because the mask layout has different derivatives generated by OPC and there are many similar "OPC brothers" that come from the same layout. However, application of fuzzy pattern matching to the mask layout is challenging due to the reasons related to the characteristics of photomask data. In this paper we introduce a novel method of fuzzy pattern matching to cope with the issues that comes from the characteristics of mask data. The rule specification is quite simple - we only need to specify a single tolerance value for each edge displacement. We will show the experimental results using the actual mask layout and prove that the calculation speed and quality of the proposed technique is satisfactory from the view point of realistic MDP processing.

Citation Download Citation

Kokoro Kato, Yoshiyuki Taniguchi, and Kuninori Nishizawa "Fuzzy pattern matching techniques for photomask layout data", Proc. SPIE 8701, Photomask and Next-Generation Lithography Mask Technology XX, 87010C (28 June 2013); https://doi.org/10.1117/12.2027851

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available