A new paradigm for in-line detection and control of patterning defects

Stefan Hunsche; Marinus Jochemsen; Vivek Jain; Xinjian Zhou; Frank Chen; Venu Vellanki; Chris Spence; Sandip Halder; Dieter van den Heuvel; Vincent Truffert

doi:10.1117/12.2087178

19 March 2015 A new paradigm for in-line detection and control of patterning defects

Stefan Hunsche, Marinus Jochemsen, Vivek Jain, Xinjian Zhou, Frank Chen, Venu Vellanki, Chris Spence, Sandip Halder, Dieter van den Heuvel, Vincent Truffert

Author Affiliations +

Proceedings Volume 9424, Metrology, Inspection, and Process Control for Microlithography XXIX; 94241B (2015) https://doi.org/10.1117/12.2087178
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

With continuously shrinking design rules and corresponding low-k1 lithography, defectivity and yield are increasingly dominated by systematic patterning defects. The size of these yield-limiting defects is shrinking along with feature size, making their detection and verification more difficult. We discuss a novel, holistic approach to pattern defect detection and control, which integrates full chip layout analysis and hybrid wafer metrology data to predict wafer locations with highest probability for defect occurrence. We assess the various components of this flow by an experimental study on a 10 nm BEOL process at IMEC, using state-of-the-art negative tone development (NTD) and triple Litho-Etch patterning process.

Citation Download Citation

Stefan Hunsche, Marinus Jochemsen, Vivek Jain, Xinjian Zhou, Frank Chen, Venu Vellanki, Chris Spence, Sandip Halder, Dieter van den Heuvel, and Vincent Truffert "A new paradigm for in-line detection and control of patterning defects", Proc. SPIE 9424, Metrology, Inspection, and Process Control for Microlithography XXIX, 94241B (19 March 2015); https://doi.org/10.1117/12.2087178

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