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9 March 2022 High-performance near-infrared spectral sensors based on a wafer-scale fabrication process
Don M. J. van Elst, Anne van Klinken, Fang Ou, Maurangelo Petruzzella, Kaylee D. Hakkel, Francesco Pagliano, René P. J. van Veldhoven, Andrea Fiore
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Proceedings Volume PC12013, MOEMS and Miniaturized Systems XXI; PC1201305 (2022) https://doi.org/10.1117/12.2605960
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
We demonstrate a near-infrared (900-1650nm) spectral sensor based on an array of 16 pixels for classifying and quantifying materials and their composition. These pixels consist of resonant-cavity enhanced photodetectors containing a thin absorbing layer, tuning element and cavity. Using a wafer-scale optical lithography process, we achieve a tunable, wavelength-specific response with narrow linewidths of 50nm and high responsivity (R>0.1A/W). The customizability of the response, small-size and robustness make it suitable for portable spectroscopic solutions in a wide variety of applications. The sensing performance is demonstrated on the prediction of moisture in rice with a coefficient of determination of R^2=0.95.
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Don M. J. van Elst, Anne van Klinken, Fang Ou, Maurangelo Petruzzella, Kaylee D. Hakkel, Francesco Pagliano, René P. J. van Veldhoven, and Andrea Fiore "High-performance near-infrared spectral sensors based on a wafer-scale fabrication process", Proc. SPIE PC12013, MOEMS and Miniaturized Systems XXI, PC1201305 (9 March 2022); https://doi.org/10.1117/12.2605960
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KEYWORDS
Sensors
Chemical analysis
Chemical elements
Spectrometers
Chemometrics
Industrial chemicals
Optical components
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