Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica

Srijoyee Datta; Raphaël Clady; Olivier Utéza; Nicolas Sanner

doi:10.1117/12.2647555

17 March 2023 Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica

Srijoyee Datta, Raphaël Clady, Olivier Utéza, Nicolas Sanner

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC1240808 (2023) https://doi.org/10.1117/12.2647555
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

We demonstrate laser-fabrication of length-controlled channels in the bulk of dielectrics with a spatial periodicity down to 0.7 µm and moderate aspect ratio (1:10), by single-shot ablation using different (fs/ps) pulse durations. We take advantage of beam shaping technique using an axicon and annular aperture to generate a Bessel beam with an extra control of the so-called “non-diffracting” length. The dimensions and pitch attained are suitable to envision the writing of NIR nanophotonic components. As a proof-of-principle demonstration, we fabricate patterns whose arrangements mimic photonic-crystal devices like waveguide, Y-coupler, and structures with square and triangular lattices as their basic units.

Conference Presentation

Citation Download Citation

Srijoyee Datta, Raphaël Clady, Olivier Utéza, and Nicolas Sanner "Laser-fabrication of length-controlled sub-micrometer periodic structures in the bulk of fused silica", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC1240808 (17 March 2023); https://doi.org/10.1117/12.2647555

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