MOEMS 3-D scan mirror for single-point control of beam deflection and focus

Yuhe Shao; David L. Dickensheets

doi:10.1117/1.2107127

1 October 2005 MOEMS 3-D scan mirror for single-point control of beam deflection and focus

Yuhe Shao, David L. Dickensheets

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041502 (October 2005). https://doi.org/10.1117/1.2107127

Abstract

A 1500-µm-diam silicon/silicon nitride 3-D scan mirror has been built using MOEMS technology. It is capable of static and dynamic beam scanning achieved with a biaxial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a 3-D space with one single optical surface, and is referred to as a MOEMS 3-D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. We describe the 3-D scan mirror design, fabrication, characterization, and briefly describe the target application. A confocal laser scanning microscope using this mirror to achieve beam scanning and focus control is also demonstrated.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yuhe Shao and David L. Dickensheets "MOEMS 3-D scan mirror for single-point control of beam deflection and focus," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041502 (1 October 2005). https://doi.org/10.1117/1.2107127

Published: 1 October 2005

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