Resolution and depth-of-focus (DOF) formulas in projection imaging are reviewed with the help of the three-dimensional point-spread function (3D PSF). The Debye integral is rigorously evaluated for the non-paraxial situation to give a closed-form expression for the axial 3D PSF from which the validity of DOF formula k3λ / sin2 ( θ / 2 ) is confirmed. |
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CITATIONS
Cited by 1 scholarly publication.
Projection lithography
Point spread functions
3D image processing
Lithography
Paraxial approximations
Extreme ultraviolet lithography
Image resolution