Commentary: Multichannel ellipsometry for monitoring processes

Ilsin An

doi:10.1117/1.3374056

1 March 2010 Commentary: Multichannel ellipsometry for monitoring processes

Ilsin An

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Journal of Nanophotonics, Vol. 4, Issue 1, 040302 (March 2010). https://doi.org/10.1117/1.3374056

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This PDF contains the commentary "Multichannel ellipsometry for monitoring processes."

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Ilsin An "Commentary: Multichannel ellipsometry for monitoring processes," Journal of Nanophotonics 4(1), 040302 (1 March 2010). https://doi.org/10.1117/1.3374056

Published: 1 March 2010

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KEYWORDS

Ellipsometry

Sensors

Thin films

Gold

Crystals

Optical properties

Spectroscopic ellipsometry

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