Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control

Osami Sasaki; Kunihiro Honma; Takamasa Suzuki

doi:10.1117/1.1737375

1 June 2004 Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control

Osami Sasaki, Kunihiro Honma, Takamasa Suzuki

Author Affiliations +

Optical Engineering, Vol. 43, Issue 6, (June 2004). https://doi.org/10.1117/1.1737375

Abstract

A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 μm, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 s.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Osami Sasaki, Kunihiro Honma, and Takamasa Suzuki "Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control," Optical Engineering 43(6), (1 June 2004). https://doi.org/10.1117/1.1737375

Published: 1 June 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available