Dr. Anne Paquet Profile

Dr. Anne Paquet

at CEA-LETI

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Publications (2)

Proceedings Article | 3 April 2020 Paper

Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

G. Rademaker, A. Le Pennec, T. Giammaria, K. Benotmane, H. Pham, C. Bouet, M. G. Gusmao Cacho, M. Argoud, M.-L. Pourteau, A. Paquet, A. Gharbi, C. Navarro, C. Nicolet, X. Chevalier, K. Sakavuyi, P. Nealey, R. Tiron

Proceedings Volume 11326, 113260Z (2020) https://doi.org/10.1117/12.2552003

KEYWORDS: Lithography, Metrology, Directed self assembly, Immersion lithography, Photomasks, Optical lithography, Etching, Critical dimension metrology, Semiconducting wafers

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Proceedings Article | 26 March 2019 Paper

Spacer patterning lithography as a new process to induce block copolymer alignment by chemo-epitaxy

A. Paquet, A. Le Pennec, A. Gharbi, T. Giammaria, G. Rademaker, M.-L. Pourteau, D. Mariolle, C. Navarro, C. Nicolet, X. Chevalier, K. Sakavuyi, L. Pain, P. Nealey, R. Tiron

Proceedings Volume 10958, 109580M (2019) https://doi.org/10.1117/12.2514960

KEYWORDS: Etching, Lithography, Optical lithography, Wet etching, HF etching, Critical dimension metrology, Silicon, System on a chip, Tin

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