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Amrish Kelkar
Applications Development Engineer at KLA Corp
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Publications (1)
Proceedings Article | 23 October 2015 Paper
Accurate defect die placement and nuisance defect reduction for reticle die-to-die inspections
L. R. Huang, Ellison Chen, Joshua Glasser, Amrish Kelkar, C. J. Lin, Y. N. Tseng, Vincent Wen, Mark Wylie, Elvik Wang, W. H. Huang, Laurent Tuo, David Wu
Proceedings Volume 9635, 96351Q (2015) https://doi.org/10.1117/12.2196931
KEYWORDS: Inspection, Reticles, Dysprosium, Defect detection, Optics manufacturing, Algorithm development, Defect inspection, Detection and tracking algorithms, Standards development, Time metrology
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