Mr. Andrey V. Kaziev Profile

Andrey V. Kaziev

at National Research Nuclear Univ MEPhI

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 7 January 2015 Paper

Andrey Kaziev, Ivan Shchelkanov, Georgy Khodachenko

Proceedings Volume 9442, 94420J (2015) https://doi.org/10.1117/12.2086913

KEYWORDS: Nickel, Surface roughness, Sputter deposition, Aluminum, Silica, Plasma, Silicon, Ions, Power supplies, Polishing

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases