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Dr. Anjie Ming
at Institute of Microelectronics
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Publications (4)
Proceedings Article | 7 February 2006 Paper
The packaging technology of optical switch arrays
Proceedings Volume 6032, 60320O (2006) https://doi.org/10.1117/12.667874
KEYWORDS: Collimators, Mirrors, Optical switching, Microopto electromechanical systems, Packaging, Etching, Switches, Silicon, Optics manufacturing, Anisotropic etching
Proceedings Article | 30 December 2004 Paper
The study on the compound x-ray refractive lens using LIGA technique
Jingqiu Liang, Zichun Le, Liangqiang Peng, Weibiao Wang, Weihua Lan, Anjie Ming, Futing Yi, Jian Ye, Bisheng Quan, Jinsong Yao, Ming Xuan, Lijun Wang
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570760
KEYWORDS: X-rays, Polymethylmethacrylate, X-ray lithography, Photomasks, X-ray technology, Photoresist materials, Manufacturing, Electroplating, X-ray optics, Absorption
Proceedings Article | 30 December 2004 Paper
Study on optical parts of MOEMS optical switch with low insertion loss
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.570729
KEYWORDS: Silicon, Microopto electromechanical systems, Etching, Mirrors, Optical switching, Packaging, Micromirrors, Single mode fibers, Switches, Optical components
Proceedings Article | 20 August 2004 Paper
The masks fabricated by UV LIGA for excimer laser ablation and x-ray lithography
Jingqiu Liang, Zichun Le, Weibiao Wang, Liangqiang Peng, Weihua Lan, Anjie Ming, Jian Ye, Bisheng Quan, Jinsong Yao, Ming Xuan, Lijun Wang
Proceedings Volume 5446, (2004) https://doi.org/10.1117/12.557781
KEYWORDS: Photomasks, Excimer lasers, Laser ablation, X-rays, X-ray lithography, Ultraviolet radiation, Photoresist materials, Polymers, Gold, Scanning electron microscopy
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