Mr. Ankur Agarwal Profile

Ankur Agarwal

Principal Research Scientist at KLA Corp

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Publications (1)

Proceedings Article | 26 May 2022 Paper

Trilayer hardmask lithography and etch for BEOL manufacturing

Prem Panneerchelvam, Chad Huard, Ankur Agarwal, Alessandro Vaglio Pret, Antonio Mani, Roel Gronheid, Marc Demand, Kaushik Kumar

Proceedings Volume 12053, 1205320 (2022) https://doi.org/10.1117/12.2614095

KEYWORDS: Etching, System on a chip, Plasma, Lithography, Semiconducting wafers, Photoresist materials, 3D modeling, Back end of line, Numerical simulations

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