Dr. Anton N. Boyko Profile

Dr. Anton N. Boyko

at MIET

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Publications (2)

Proceedings Article | 30 December 2016 Paper

Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry

Anton Boyko, Olga Pyatilova, Rustam Kalmykov, Dahir Gaev, Sergei Timoshenkov, Sergei Gavrilov

Proceedings Volume 10224, 102240H (2016) https://doi.org/10.1117/12.2267147

KEYWORDS: Fractal analysis, Wet etching, Silicon, Scanning electron microscopy, Adsorption, Detection and tracking algorithms, Solids, Thermodynamics, Etching, Metals

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Proceedings Article | 18 December 2014 Paper

Development of driving setup for micromechanical friction vacuum gauge

Anton Boyko, Andrei Shalimov, Sergei Timoshenkov, Pavel Kovyrkin

Proceedings Volume 9440, 94400U (2014) https://doi.org/10.1117/12.2180876

KEYWORDS: Resonators, Transducers, Switching, Microelectromechanical systems, Electrodes, Oscilloscopes, Silicon, Capacitance, Signal processing, Data conversion

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