Dr. Bjørn Mikladal Profile

Dr. Bjørn Mikladal

at Canatu Oy

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Publications (3)

Proceedings Article | 21 November 2023 Presentation + Paper

Carbon nanotube membranes for EUV photolithography: a versatile material platform

Jarkko Etula, Ahmed Soliman, Tuhin Ghosh, Bjørn Mikladal, Emma Salmi, Emile Van Veldhoven, Kirill Chernenko, Ilkka Varjos, Taneli Juntunen

Proceedings Volume 12750, 127500M (2023) https://doi.org/10.1117/12.2686790

KEYWORDS: Extreme ultraviolet, Carbon nanotubes, Optical lithography, Pellicles, X-ray photoelectron spectroscopy, Transparency, Transmission electron microscopy, Surface chemistry, Scanning electron microscopy, FT-IR spectroscopy

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Proceedings Article | 31 August 2022 Poster + Paper

Carbon nanotubes thin filters for x-ray detectors in space

Marco Barbera, Ugo Lo Cicero, Luisa Sciortino, Michela Todaro, Elena Puccio, Fabio D'Anca, Nicola Montinaro, Salvatore Varisco, Pekka Törmä, Lauri Riuttanen, Ilkka Varjos, Bjorn Mikladal, Elena Magnano, Igor Pis, Christian Gollwitzer, Evelyn Handick, Michael Krumrey, Christian Laubis

Proceedings Volume 12181, 121814H (2022) https://doi.org/10.1117/12.2631516

KEYWORDS: Aluminum, X-rays, Pellicles, Transmittance, Oxides, Optical filters, X-ray detectors, Manufacturing

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Proceedings Article | 12 October 2021 Presentation + Paper

Small scale, big impact: the world’s thinnest and strongest free-standing carbon nanotube membrane

Jarkko Etula, Bjørn Mikladal, Mari Makkonen, Esko Kauppinen, Ilkka Varjos

Proceedings Volume 11854, 118540S (2021) https://doi.org/10.1117/12.2599072

KEYWORDS: Extreme ultraviolet lithography, Particle filters, Transparent conducting films, Extreme ultraviolet, Carbon nanotubes, Particles, X-rays, Metals, Coating, Transmission electron microscopy, Pellicles, Transmittance, EUV optics

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