Prof. Bo Liu Profile

Prof. Bo Liu

at Shanghai Institute of Microsystem and Information

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Author

Publications (20)

Proceedings Article | 12 October 2016 Paper

Femtosecond laser pulse induced phase transition of Cr-doped Sb2Te1 films studied with a pump-probe system

Minghui Jiang, Qing Wang, Kai Lei, Yang Wang, Bo Liu, Zhitang Song

Proceedings Volume 9818, 981815 (2016) https://doi.org/10.1117/12.2249274

KEYWORDS: Femtosecond phenomena, Reflectivity, Crystals, Chromium, Thin films, Laser crystals, Doping, Tellurium, Antimony, Visualization

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Proceedings Article | 12 October 2016 Paper

Investigation of (SiC)0.85-Sb3Te alloy for high-reliability PCM applications

Tianqi Guo, Sannian Song, Le Li, Lanlan Shen, Bo Liu, Zhitang Song, Ming Qi, Songlin Feng

Proceedings Volume 9818, 98180U (2016) https://doi.org/10.1117/12.2246984

KEYWORDS: Silicon carbide, Doping, Crystals, Resistance, Tellurium, Transmission electron microscopy, Silicon, Antimony, Reliability, Switching

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Proceedings Article | 12 October 2016 Paper

Microstructure and electrical properties of Sb2Te phase-change material

Guangyu Liu, Liangcai Wu, Tao Li, Feng Rao, Sannian Song, Bo Liu, Zhitang Song

Proceedings Volume 9818, 98180S (2016) https://doi.org/10.1117/12.2246978

KEYWORDS: Optical discs, Crystals, Resistance, Transmission electron microscopy, Tellurium, Antimony, Doping, Chemical species, Diffraction, Chalcogenides

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Proceedings Article | 12 October 2016 Paper

Reactive ion etching effects on carbon-doped Ge2Sb2Te5 phase change material in CF4/Ar plasma

Lanlan Shen, Sannian Song, Zhitang Song, Le Li, Tianqi Guo, Bo Liu, Liangcai Wu, Yan Cheng, Songlin Feng

Proceedings Volume 9818, 98180M (2016) https://doi.org/10.1117/12.2245726

KEYWORDS: Crystals, Reactive ion etching, Plasma, Carbon, Etching, Polymers, Argon, Fluorine, Ions, Anisotropy

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Proceedings Article | 12 October 2016 Paper

Simulation of phase-change random access memory with 35nm diameter of the TiN bottom electrode by finite element modeling

Qiuxue Jin, Bo Liu, Yan Liu, Heng Wang, Zhen Xu, Dan Gao, Qing Wang, Yangyang Xia, Weiwei Wang, Zhitang Song, Songlin Feng

Proceedings Volume 9818, 98180K (2016) https://doi.org/10.1117/12.2245269

KEYWORDS: Tin, Electrodes, Finite element methods, Resistance, 3D modeling, Crystals, Manufacturing, Process modeling, Interfaces, Titanium

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Proceedings Article | 12 October 2016 Paper

Te-free environmental materials of TixSb2.19Se applied in phase change memory

Yueqin Zhu, Sannian Song, Le Li, Huaqing Xie, Zhitang Song, Bo Liu, Junxing Wu

Proceedings Volume 9818, 98180T (2016) https://doi.org/10.1117/12.2246980

KEYWORDS: Crystals, Transmission electron microscopy, Sputter deposition, Antimony, Technetium, Selenium, Resistance, Tellurium, Diffraction, Doping

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Proceedings Article | 12 October 2016 Paper

Electrical properties of Cr-doped Sb2Te3 phase change material

Qing Wang, Bo Liu, Yangyang Xia, Yonghui Zheng, Sannian Song, Yan Cheng, Zhitang Song, Songlin Feng

Proceedings Volume 9818, 98180H (2016) https://doi.org/10.1117/12.2245039

KEYWORDS: Crystals, Chromium, Chemical species, Antimony, Semiconductors, Resistance, Tellurium, Electrons, Chalcogenides, Transmission electron microscopy

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Proceedings Article | 12 October 2016 Paper

Influence of silicon oxide on the performance of TiN bottom electrode in phase change memory

Dan Gao, Bo Liu, Zhen Xu, Heng Wang, Yangyang Xia, Lei Wang, Nanfei Zhu, Ying Li, Yipeng Zhan, Zhitang Song, Songlin Feng

Proceedings Volume 9818, 98180I (2016) https://doi.org/10.1117/12.2245062

KEYWORDS: Oxidation, Silicon, Oxides, Tin, Electrodes, Titanium, Transmission electron microscopy, Silica, Resistance, Thin films

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Proceedings Article | 12 October 2016 Paper

Phase change properties of Ti-Sb-Te thin films deposited by thermal atomic layer deposition

Sannian Song, Lanlan Shen, Zhitang Song, Dongning Yao, Tianqi Guo, Le Li, Bo Liu, Liangcai Wu, Yan Cheng, Yuqiang Ding, Songlin Feng

Proceedings Volume 9818, 98180N (2016) https://doi.org/10.1117/12.2246211

KEYWORDS: Atomic layer deposition, Thin film deposition, Thin films, Resistance, Crystals, Chalcogenides, Chemical vapor deposition, Scanning electron microscopy, Fast packet switching, Switching

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Proceedings Article | 12 October 2016 Paper

Optimization of J-V characteristic in diode array for phase change memory

Heng Wang, Yan Liu, Bo Liu, Chao Zhang, Zhitang Song

Proceedings Volume 9818, 98180R (2016) https://doi.org/10.1117/12.2246915

KEYWORDS: Diodes, TCAD, Resistance, Boron, 3D modeling, Silicon, CMOS technology, Arsenic, Manufacturing, Field effect transistors

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Proceedings Article | 12 October 2016 Paper

Development and application of a new CMP slurry for phase change memory

Lei Yu, Weili Liu, Bo Liu, Zhitang Song

Proceedings Volume 9818, 98180X (2016) https://doi.org/10.1117/12.2248154

KEYWORDS: Chemical mechanical planarization, Silica, Semiconducting wafers, Surface finishing, Polishing, Abrasives, Scanning electron microscopy, Oxides, Manufacturing, Dielectrics

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Proceedings Article | 12 October 2016 Paper

Formation of recessed hole by NF3/O2 etching for phase change memory

Zhen Xu, Bo Liu, Dan Gao, Heng Wang, Yangyang Xia, Zhitang Song, Lei Wang, Yipeng Zhan, Songlin Feng

Proceedings Volume 9818, 98180O (2016) https://doi.org/10.1117/12.2246305

KEYWORDS: Etching, Oxidation, Tin, Oxygen, Sputter deposition, Transmission electron microscopy, Electrodes, X-rays, Plasma systems, Manufacturing

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Proceedings Article | 24 January 2013 Paper

Optical emission spectroscopy analysis for Ge2Sb2Te5 etching endpoint detection in HBr/He plasma

Juntao Li, Bo Liu, Zhitang Song, Gaoming Feng, Guanping Wu, Aodong He, Zuoya Yang, Nanfei Zhu, Jia Xu, Jiadong Ren, Songlin Feng

Proceedings Volume 8782, 87820L (2013) https://doi.org/10.1117/12.2018658

KEYWORDS: Etching, Plasma, Bromine, Signal detection, Emission spectroscopy, Interfaces, Process control, Scanning electron microscopy, Signal processing, Optical lithography

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Proceedings Article | 24 January 2013 Paper

Analysis of anomalous cells within RESET distribution for phase change memory

Linhai Xu, Xiaogang Chen, Zhitang Song, Yifeng Chen, Bo Liu, Houpeng Chen, Zuoya Yang, Guanping Wu, Daolin Cai, Gaoming Feng, Ying Li

Proceedings Volume 8782, 878212 (2013) https://doi.org/10.1117/12.2018220

KEYWORDS: Resistance, Computer programming, Crystals, Switches, Transistors, Remote sensing, Failure analysis, Nanofabrication, Nanotechnology, Information technology

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Proceedings Article | 24 January 2013 Paper

Reactive etching of a novel phase change material Si2Sb2Te3

Mengjiao Xia, Feng Rao, Zhitang Song, Kun Ren, Liangcai Wu, Bo Liu

Proceedings Volume 8782, 87820Z (2013) https://doi.org/10.1117/12.2016674

KEYWORDS: Etching, Tellurium, Antimony, Argon, Silicon, Scanning electron microscopy, Surface roughness, Reactive ion etching, Photoemission spectroscopy, Plasma

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Proceedings Article | 24 January 2013 Paper

Phase change materials for multi-level storage phase change memory

Kun Ren, Feng Rao, Zhitang Song, Min Zhu, Yuefeng Gong, Liangcai Wu, Bo Liu, Songlin Feng

Proceedings Volume 8782, 87820I (2013) https://doi.org/10.1117/12.2016744

KEYWORDS: Resistance, Crystals, Technetium, Electrodes, Computer simulations, Germanium, Antimony, Tellurium, Finite element methods, Protactinium

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Proceedings Article | 24 January 2013 Paper

Chemical mechanical planarization of amorphous Ge2Sb2Te5 using KClO4 as oxidizer in acidic slurry

Aodong He, Zhitang Song, Bo Liu, Min Zhong, Weili Liu, Liangyong Wang, Weixia Yan, Yu Lei, Guanping Wu

Proceedings Volume 8782, 87820Y (2013) https://doi.org/10.1117/12.2015253

KEYWORDS: Chemical mechanical planarization, Germanium, Antimony, Tellurium, Etching, Chemical elements, Resistance, Polishing, Corrosion, Temperature metrology

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Proceedings Article | 24 January 2013 Paper

Schottky-barrier diode array fabrication with self-aligned Ni silicidation for low power phase-change memory application

Yan Liu, Zhitang Song, Bo Liu, Houpeng Chen, Guanping Wu, Chao Zhang, Lianhong Wang, Lei Wang, Songlin Feng

Proceedings Volume 8782, 878213 (2013) https://doi.org/10.1117/12.2018456

KEYWORDS: Diodes, Resistance, Silicon, Platinum, Array processing, TCAD, Nickel, Semiconducting wafers, Instrument modeling, Arsenic

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Proceedings Article | 24 January 2013 Paper

A comparison of the Ge-Sb-Te and Si-Sb-Te film oxidization at atmosphere

Wanchun Ren, Bo Liu, Zhitang Song, Xuezhen Jing, Yanghui Xiang, Haibo Xiao, Zongtao Wang, Beichao Zhang, Jia Xu, Guanping Wu, Ruijuan Qi, Chunyan Fan, Shuqing Duan, Qinqin Yu, Songlin Feng

Proceedings Volume 8782, 87820J (2013) https://doi.org/10.1117/12.2017630

KEYWORDS: Oxygen, Plasma, Argon, Atmospheric plasma, Crystals, Silicon, Plasma treatment, Chemical analysis, Nitrogen, Transmission electron microscopy

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Proceedings Article | 20 May 2009 Paper

Modeling and simulation research of a new calibration platform for visual test system

Liu Bo, Ye Dong, Rensheng Che

Proceedings Volume 7283, 72831T (2009) https://doi.org/10.1117/12.828684

KEYWORDS: Calibration, Rockets, Motion measurement, Kinematics, Prototyping, Standards development, Modeling and simulation, Visualization, 3D metrology, 3D modeling

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Showing 5 of 20 publications

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