Dr. Chang Zhou Profile

Dr. Chang Zhou

at Shanghai Micro Electronics Equipment Co Ltd

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Publications (2)

Proceedings Article | 5 April 2012 Paper

Diffraction-based overlay measurement on dedicated mark using rigorous modeling method

Hailiang Lu, Fan Wang, Qingyun Zhang, Yonghui Chen, Chang Zhou

Proceedings Volume 8324, 832422 (2012) https://doi.org/10.1117/12.916365

KEYWORDS: Overlay metrology, Diffraction, Scatterometry, Diffraction gratings, Reflectance spectroscopy, Spectroscopy, Scatter measurement, Semiconducting wafers, Reflectometry, Time metrology

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Proceedings Article | 20 April 2011 Paper

A study and simulation of the impact of high-order aberrations to overlay error distribution

G. Sun, F. Wang, C. Zhou

Proceedings Volume 7971, 79712K (2011) https://doi.org/10.1117/12.879365

KEYWORDS: Distortion, Overlay metrology, Source mask optimization, Semiconducting wafers, Metrology, Error analysis, Prototyping, Monochromatic aberrations, Image sensors

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