Dr. Gang Sun Profile

Dr. Gang Sun

Department Manager at Shanghai Micro Electronics Equipment Co Ltd

SPIE Involvement:

Author

Publications (10)

SPIE Journal Paper | 24 January 2019

Predictor of thermal aberrations via particle filter for online compensation

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Weijie Shi, Yang Bu, Xiangzhao Wang

JM3, Vol. 18, Issue 01, 013502, (January 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.1.013502

KEYWORDS: Particle filters, Filtering (signal processing), Thermal modeling, Particles, Semiconducting wafers, Projection systems, Lithography, Photomasks, Data modeling, Calibration

Read Abstract +

SPIE Journal Paper | 11 April 2018

Modeling and optimization of lens heating effect for lithographic projector

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Yang Bu, Xiangzhao Wang

JM3, Vol. 17, Issue 02, 023501, (April 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.2.023501

KEYWORDS: Projection systems, Lithography, Optical components, Optimization (mathematics), Thermal modeling, Refractive index, Photomasks, Optical design, Lithographic illumination, Thermography

Read Abstract +

Proceedings Article | 20 March 2018 Paper

Prediction of lens heating induced aberration via particle filter in optical lithography

Yanjie Mao, Sikun Li, Gang Sun, Lifeng Duan, Weijie Shi, Yang Bu, Xiangzhao Wang

Proceedings Volume 10587, 105871K (2018) https://doi.org/10.1117/12.2297338

KEYWORDS: Particle filters, Semiconducting wafers, Lithography, Thermal modeling, Projection systems, Data modeling, Optical lithography, Manufacturing

Read Abstract +

Proceedings Article | 24 March 2017 Paper

The thermal aberration analysis of a lithography projection lens

Yanjie Mao, Sikun Li, Gang Sun, Jian Wang, Lifeng Duan, Yang Bu, Xiangzhao Wang

Proceedings Volume 10147, 101471P (2017) https://doi.org/10.1117/12.2258037

KEYWORDS: Lens design, Thermal modeling, Lithography, Optical lithography, Refractive index, Optical design, Thermal analysis, Wavefront aberrations, Optical components, Silica, Photomasks

Read Abstract +

Proceedings Article | 14 July 2015 Paper

Numerical investigation of temperature field Induced by dual wavelength lasers in sub-microsecond laser annealing technology for insulated gate bipolar transistor

GuoDong Cui, Mingying Ma, Fan Wang, Gang Sun, Yanping Lan, Wen Xu

Proceedings Volume 9532, 953223 (2015) https://doi.org/10.1117/12.2186011

KEYWORDS: Annealing, Field effect transistors, Temperature metrology, Pulsed laser operation, Laser applications, Semiconducting wafers, Absorption, Semiconductor lasers, Laser systems engineering, Silicon

Read Abstract +

Proceedings Article | 18 April 2013 Paper

A novel focus monitoring technique using Iso-Dense overlay mark

S.X. Li, J.R. Cheng, A. Bourov, G. Sun

Proceedings Volume 8681, 86811H (2013) https://doi.org/10.1117/12.2011422

KEYWORDS: Semiconducting wafers, Binary data, Photomasks, Scanners, Overlay metrology, Lithography, Phase shifts, Reticles, Critical dimension metrology, Process control

Read Abstract +

Proceedings Article | 13 March 2012 Paper

The overlay performance optimization based on overlay manager system

G. Sun, J. Zhu, S. X. Li, F. L. Mao, L. F. Duan

Proceedings Volume 8326, 832625 (2012) https://doi.org/10.1117/12.916283

KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, Optical alignment, Source mask optimization, Data modeling, Control systems, Software development, Time metrology, Process control

Read Abstract +

Proceedings Article | 20 April 2011 Paper

A study and simulation of the impact of high-order aberrations to overlay error distribution

G. Sun, F. Wang, C. Zhou

Proceedings Volume 7971, 79712K (2011) https://doi.org/10.1117/12.879365

KEYWORDS: Distortion, Overlay metrology, Source mask optimization, Semiconducting wafers, Metrology, Error analysis, Prototyping, Monochromatic aberrations, Image sensors

Read Abstract +

Proceedings Article | 23 March 2011 Paper

New 0.75 NA ArF scanning lithographic tool

Lifeng Duan, Jianrui Cheng, Gang Sun, Yonghui Chen

Proceedings Volume 7973, 79732D (2011) https://doi.org/10.1117/12.879376

KEYWORDS: Semiconducting wafers, Fiber optic illuminators, Reticles, Interferometers, Lithography, Overlay metrology, Scanners, Imaging systems, Mechanics, Projection systems

Read Abstract +

Proceedings Article | 31 January 2005 Paper

Modeling of enhanced second-harmonic generation with phase-matching in periodic subwavelength structure metal film

Min Quan, Li Zhan, Gang Sun, S. Luo, Qing Ye, Yuxing Xia

Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.574925

KEYWORDS: Metals, Second-harmonic generation, Spiral phase plates, Silver, Refractive index, Quartz, Surface plasmons, Harmonic generation, Plasma, Transmittance

Read Abstract +

Showing 5 of 10 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years