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Changho Noh
at Samsung Advanced Institute of Technology
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Publications (3)
Proceedings Article | 4 May 2005 Paper
A novel patterning method of low-resistivity metals
Chang-Ho Noh, Jin-Young Kim, Ho-Chul Lee, Ok-Chae Hwang, Sung-Heon Cho, Ki-Yong Song, Jong-Min Kim
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.597281
KEYWORDS: Nickel, Metals, Palladium, Copper, Silver, Ultraviolet radiation, Optical lithography, Electroless plating, Ions, Photomasks
Proceedings Article | 24 July 2002 Paper
Fluorocarbon-based single-layer resist for 157-nm lithography
Ki-Yong Song, Kwang-Sub Yoon, Sang-Jun Choi, Sang-Gyun Woo, Woo-Sung Han, Jae-Jun Lee, Sang-Kyun Lee, Chang-Ho Noh, Kenji Honda
Proceedings Volume 4690, (2002) https://doi.org/10.1117/12.474248
KEYWORDS: Polymers, Lithography, Absorbance, Etching, Carbonates, Resistance, Plasma, Transparency, Systems modeling, Photoresist materials
Proceedings Article | 24 August 2001 Paper
Novel deep UV photoresist with thermally crosslinkable photoacid generator
Chang-Ho Noh, Sang-Kyun Lee, Bongsuk Moon, Kenji Honda
Proceedings Volume 4345, (2001) https://doi.org/10.1117/12.436886
KEYWORDS: Polymers, Line edge roughness, Lithography, Carbonates, Photoresist materials, Deep ultraviolet, Photomasks, Image processing, Chemistry, Binary data
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