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ChengZhen Yu
at Beijing Institute of Technology
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Publications (1)
Proceedings Article | 22 February 2021 Poster + Paper
Fast optical proximity correction based on graph convolution network
Proceedings Volume 11613, 116130V (2021) https://doi.org/10.1117/12.2583773
KEYWORDS: Optical proximity correction, Signal processing, Convolution, Imaging systems, Systems modeling, Photomasks, Optimization (mathematics), Machine learning, Lithography, Integrated circuits
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