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Chumeng Zheng
Grad Student
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Publications (1)
Proceedings Article | 8 March 2016 Paper
Assessments of image-based and scatterometry-based overlay targets
Chiew-seng Koay, Nelson Felix, Bassem Hamieh, Scott Halle, Chumeng Zheng, Stuart Sieg
Proceedings Volume 9778, 97781K (2016) https://doi.org/10.1117/12.2220382
KEYWORDS: Overlay metrology, Image segmentation, Scatterometry, Metrology, Semiconducting wafers, Front end of line, Back end of line, Optical lithography, Inspection, Optical filters, Sensors, Reflectivity, Solids
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