Mr. Chun-Han Liu Profile

Chun-Han Liu

at Shanghai Huali Integrated Circuit Corp.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 20 March 2020 Paper

The improvement of measurement accuracy of SADP pitch walking issue

Pei Liu, Cheng-Zhang Wu, Hung-Wen Chao, Wenzhan Zhou, Yu Zhang, Chan-Yuan Hu, Yujie Xu, Jhen-Cyuan Li, Yen-Chan Chiu, Chun-Han Liu, Ran-Fu Yang, Chi-Hung Wang

Proceedings Volume 11325, 113252Z (2020) https://doi.org/10.1117/12.2552057

KEYWORDS: Transmission electron microscopy, Calibration, Semiconducting wafers, Electron microscopes, Fin field effect transistors, Image filtering, Scanning electron microscopy, Etching, Image quality, Integrated circuits, Deep ultraviolet, 193nm lithography, Electro optical systems calibration, Precision measurement, Accuracy assessment

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years