Chung-Shin Kang
Architect
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 May 2006 Paper
Proceedings Volume 6283, 62832S (2006) https://doi.org/10.1117/12.681806
KEYWORDS: Process modeling, Optimization (mathematics), Resolution enhancement technologies, Manufacturing, Optical proximity correction, Photomasks, Calibration, Image processing, Semiconducting wafers, Systems modeling

Proceedings Article | 10 July 2003 Paper
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.485253
KEYWORDS: Computer aided design, Manufacturing, Optical proximity correction, Photomasks, Optics manufacturing, Phase shifts, Integrated circuit design, Resolution enhancement technologies, Lithography, Design for manufacturability

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