Dr. Chungik Oh Profile

Dr. Chungik Oh

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 12 November 2024 Presentation + Paper

Effective medium approximation for EUV multilayer intermixing

Seulki Roh, Taewon Go, Chungik Oh, Hanjune Yoon, Hakseung Han, Sanghee Lee

Proceedings Volume 13216, 132160A (2024) https://doi.org/10.1117/12.3034567

KEYWORDS: Silicon, Molybdenum, Extreme ultraviolet, Reflection, Data modeling, Refraction, Transmission electron microscopy, Reflectivity, Interfaces, Ruthenium

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