Dr. Daniel Greene Profile

Dr. Daniel Greene

at DuPont Electronics & Industrial

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Publications (2)

Proceedings Article | 25 March 2019 Paper

High temperature spin on carbon materials with excellent planarization and CVD compatibility

Keren Zhang, Li Cui, Shintaro Yamada, Jim Cameron, Sabrina Wong, Lawrence Chen, Suzanne Coley, Dan Greene, Joshua Kaitz, Iou-Sheng Ke, Bhooshan Popere, Paul LaBeaume, Benjamin Foltz, Lei Zhang, Kenneth Kearns, Johnpeter Ngunjiri

Proceedings Volume 10960, 1096019 (2019) https://doi.org/10.1117/12.2514968

KEYWORDS: Chemical vapor deposition, Carbon, Polymers, Resistance, Coating, Etching, 193nm lithography, Materials

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Proceedings Article | 13 March 2018 Paper

The development of an SC1 removable si-anti-reflective-coating

Shintaro Yamada, Iou-Sheng Ke, Charlotte Cutler, Li Cui, Paul LaBeaume, Daniel Greene, Bhooshan Popere, Chris Sullivan, JoAnne Leonard, Suzanne Coley, Sabrina Wong, Owendi Ongayi, Jim Cameron, Michael Clark, Thomas Fitzgibbons

Proceedings Volume 10586, 105860L (2018) https://doi.org/10.1117/12.2297687

KEYWORDS: Etching, Dry etching, Lithography, Polymers, Reflectivity, Ion implantation

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