Devin M. Lewis
SPIE Involvement:
Author
Area of Expertise:
Vacuum systems , Thin film evaporation , LiF
Publications (5)

Proceedings Article | 26 August 2024 Presentation + Paper
Proceedings Volume 13100, 131000K (2024) https://doi.org/10.1117/12.3018471
KEYWORDS: Aluminum, Reflectivity, Laser induced fluorescence, Humidity, X-ray photoelectron spectroscopy, Atomic force microscopy, Relative humidity, Coating, Semiconducting wafers, Mirrors

Proceedings Article | 21 August 2024 Paper
Proceedings Volume 13093, 1309340 (2024) https://doi.org/10.1117/12.3021592
KEYWORDS: Aluminum, Reflectivity, Silicon, Mirrors, Laser induced fluorescence, Far ultraviolet, Semiconducting wafers, Zerodur, Vacuum chambers, Relative humidity

Proceedings Article | 3 October 2023 Presentation + Paper
Proceedings Volume 12694, 1269404 (2023) https://doi.org/10.1117/12.2692397
KEYWORDS: Iron, Magnetism, Extreme ultraviolet, Calibration, Spectral calibration, Gold, High harmonic generation, X-rays

Proceedings Article | 29 August 2022 Poster + Presentation + Paper
Proceedings Volume 12188, 121884M (2022) https://doi.org/10.1117/12.2630514
KEYWORDS: Atomic force microscopy, Humidity, Aluminum, Thin films, Lithium, Silicon, Surface roughness, Mirrors

Proceedings Article | 15 December 2020 Poster + Paper
Devin Lewis, Caleb Michael Plewe, Alexandra Gallion Stapley, Joshua Vawdrey, R. Steven Turley, David Allred
Proceedings Volume 11451, 1145141 (2020) https://doi.org/10.1117/12.2576258
KEYWORDS: Laser induced fluorescence, Mirrors, Lithium, Scanning electron microscopy, Humidity, Thin films, Aluminum, Temperature metrology, Spectroscopy, Spectroscopic ellipsometry

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