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Edy Yulianto
at Shizuoka Univ
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Publications (1)
Proceedings Article | 4 March 2019 Presentation + Paper
Characterization of latent three-dimensional exposure patterns in photoresists
Edy Yulianto, Vytautas Purlys, Vygantas Mizeikis
Proceedings Volume 10930, 109300G (2019) https://doi.org/10.1117/12.2510806
KEYWORDS: Photoresist materials, Luminescence, Microscopy, Photopolymerization, Spatial resolution, Photoresist developing, Molecules
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