Dr. Eric Bakker Profile

Dr. Eric Bakker

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

ArFi speckle reduction and impact on local CDU

Will Conley, Stephen Hsu, Michael Crouse, Dylan Martin, Rajasekhar Rao, Natalllia Karlitskaya, Dirk van Leuken, Jan Baselmans, Marieke van Veen, Edwin de Jong, Birgitt Hepp, Rasmus Nielsen, Eric Bakker

Proceedings Volume PC12953, PC129530D (2024) https://doi.org/10.1117/12.3010892

KEYWORDS: Speckle, Pulsed laser operation, Line width roughness, Semiconducting wafers, Laser scanners, Simulations, Red lasers, Modulation, Edge roughness, Data processing

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Proceedings Article | 13 June 2017 Paper

Scatterometry for advanced process control in semiconductor device manufacturing

Arie den Boef, Hugo Cramer, Stefan Petra, Bastiaan Onne Fagginger Auer, Jolanda Schmetz-Schagen, Armand Koolen, Olaf van Loon, Gudrun de Gersem, Pieter Klandermans, Eric Bakker

Proceedings Volume 10449, 1044916 (2017) https://doi.org/10.1117/12.2270595

KEYWORDS: Scatterometry, Metrology, Semiconducting wafers, Semiconductors, Overlay metrology, Critical dimension metrology, Process control, Semiconductor manufacturing, Manufacturing, Lithography

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