Dr. Eric Hansen Profile

Dr. Eric Hansen

at Lam Research Corp

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Publications (1)

SPIE Journal Paper | 17 August 2022

Analytical approach to metal oxide resist modeling: exposure, bake, and network formation

Eric Hansen, Yichi Zhang, Ji Yeon Kim, William Hinsberg

JM3, Vol. 21, Issue 04, 041405, (August 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041405

KEYWORDS: Optical lithography, Oxides, Metals, Photons, Extreme ultraviolet lithography, FT-IR spectroscopy, Extreme ultraviolet, Computer simulations, Monte Carlo methods, Absorption

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