Dr. Evgenii Sukhov Profile

Dr. Evgenii Sukhov

at Synopsys GmbH

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Publications (2)

Proceedings Article | 12 November 2024 Presentation + Paper

Predictive printability assessment of EUV mask defects

Nicole Wu, Chun-Cheng Liao, Jirka Schatz, Thomas Muelders, Mariya Braylovska, John Tsai, Martin Bohn, Evgenii Sukhov, Wolfgang Demmerle

Proceedings Volume 13216, 1321611 (2024) https://doi.org/10.1117/12.3034491

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Contour extraction, Metrology, 3D mask effects, Printing, Lithography, Data modeling, Image processing, Calibration

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Proceedings Article | 15 March 2016 Paper

SEM signal emulation for 2D patterns

Evgenii Sukhov, Thomas Muelders, Ulrich Klostermann, Weimin Gao, Mariya Braylovska

Proceedings Volume 9780, 97801O (2016) https://doi.org/10.1117/12.2223033

KEYWORDS: Scanning electron microscopy, Critical dimension metrology, Calibration, Metrology, Lithography, Electron beams, 3D modeling, Cadmium, Image acquisition, Computer simulations

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