Mr. Fei Lin Liu Profile

Fei Lin Liu

at Taiwan Mask Corp

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Author

Publications (3)

Proceedings Article | 26 August 2024 Paper

Enhancement of mask data verification with Smart-MRC and machine learning

Fei-Lin Liu, Shu-Yi Chou, Chi-Ian Ip, Hui-Min Leong, Min-Ru Wei, Po-Sheng Wang, Liang-Chieh Lin, Saghir Munir

Proceedings Volume 13177, 131770X (2024) https://doi.org/10.1117/12.3034282

KEYWORDS: Data conversion, Machine learning, Inspection, Electronic design automation, Manufacturing, Photomasks, Data modeling, Education and training, Image classification, Data processing

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Proceedings Article | 29 September 2023 Paper

Application of pattern matching on single die photomask for AIMS reference image searching

Fei Lin Liu, Yi-Min Lin, Po-Sheng Wang, Liang-Chieh Lin

Proceedings Volume 12915, 129150N (2023) https://doi.org/10.1117/12.2684881

KEYWORDS: Photomasks, Optical proximity correction, Manufacturing, Design and modelling, Printing, Inspection, Automation, Image processing, Lithography, Electronic design automation

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Proceedings Article | 16 September 2022 Poster + Paper

The application of mask data preparation on KLA DB inspection

Fei-Lin Liu, Po-Hsiang Yang, Liang-Chieh Lin, Po-Sheng Wang

Proceedings Volume 12325, 123250U (2022) https://doi.org/10.1117/12.2640662

KEYWORDS: Inspection, Calibration, Algorithm development, Reticles, Manufacturing, Optical simulations, Image transmission, Diffusion, Data conversion

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