640×512 back illuminated EMCCD is based on 640×512 front-face illuminated EMCCD. It is manufactured by wafer bonding, back thinning, laser annealing, film sputtering and other back illumination processes. After parameter test and imaging verification, 640×512 back illuminated EMCCD has the characteristics of high quantum efficiency, high detection sensitivity and anti-blooming, which is suitable for imaging in low illumination environment.
Silicon photomultiplier (SiPM) is a large-scale array solid-state photodetector based on avalanche multiplication effect in semiconductor technology for low photon flux detection. In order to improve the quantum efficiency and gain factor of SiPM devices and satisfy the application of devices in high economic and social values such as medical health, military security and space exploration, SiPM structures and key technologies with different process designs or materials have been studied and published. This paper briefly describes the basic structure, technical principle and development process of SiPM devices, and describes several typical SiPM quenching structures in the development process. Finally, the products and application prospects of SiPM devices are prospected.
Inter-column transfer EMCCD uses N-type epitaxial P-well N-channel and four-layer polysilicon double-layer metal technology. It has 768×576 effective pixels and the pixel size is 13μm×13μm. The sensor has a global shutter, the maximum horizontal readout rate is 40MHz, and the dynamic range of the non-multiplier mode is 68dB.
For a large amount of near-infrared information is introduced to EMCCD, which leads to color distortion in the green plant area during R, G, B channel image fusion. In this paper, an algorithm combing dark channel prior and sub-region correction is proposed. First, the results of dark channel prior and sub-region extraction of green plant areas are analyzed and compared, we find that both of them have shortcomings. Second, on the basis of the preliminary dark channel extraction, binaryzation parameters are determined by analyzing the brightness mean values of various scenes in R, G, B and gray channel, so as to realize the extraction of green plant areas. Finally, the color correction is carried out in different regions and the image is converted from RGB color space to HIS color space. To make full use of the infrared information in the system, the I channel is replaced by gray channel. It is proved that the correction algorithm proposed in this paper can effectively correct the color biased image acquired by EMCCD system.
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