In this study, we present a novel approach combining nano-scale imprint lithography (NIL) and reactive ion etching (RIE) to fabricate high-quality surface relief gratings (SRGs). This study provides valuable insights into the challenges and optimizations in fabricating SRGs from TiO2 layers using the combination of NIL and RIE. The work was performed with SCHOTT RealView® substrates coated with a 100 nm TiO2 layer and a NIL mask with pattern widths of 200 nm and a pitch of 400 nm. The substrates were processed using the SmartNIL® method to prepare the NIL mask. The advantage of removing the residual layer before the actual structuring of the TiO2 using argon plasma was demonstrated in our research. This led to a significant increase in the selectivity between TiO2 and the NIL resist UV/OA R18. Through the employment of a two-step etching process, which involved the removal of the residual layer with argon plasma and the use of a BCl3-based reactive process with high ion energy, TiO2 structures with a height of 100 nm and a sidewall angle of 75° were successfully created. An effective selectivity of 0.84 was achieved for this two-step process.
Amidst the mixed news surrounding the feasibility of Augmented Reality (AR) smart glasses, the demand for commercially viable mass production of industry-standard optical waveguide combiners remains unwavering. Over the past two years, our consortium of companies has proposed a cost-effective and scalable manufacturing process for Surface Relief Grating (SRG) based waveguides, offering a comprehensive path from concept to fabrication through large-area nanoimprinting. This approach has garnered significant interest from both customers and partners associated with the participating companies. Our aim is to push beyond the established limits of large-area nanoimprinting. In this work we address the obstacles and latest advancements in maintaining imprint quality, fidelity and uniformity during large-area nanoimprinting. We demonstrate various building blocks that are crucial to manufacture high quality and cost-effective AR waveguides, such as the replication of slanted gratings and the possibility of low residual layer thickness using large-area nanoimprint lithography. We employ high refractive index materials, such as resin and glass (1.8, 1.9 and 2.0), and also explore a lighter and flatter version of the RealView 1.9 glass. Our primary objective is to demonstrate that large-area nanoimprinting not only presents itself as a novel method for high-volume manufacturing of SRG waveguides but also enables the production of challenging optics for AR smart glasses.
Nanoimprinting of surface-relief grating-based waveguides has the potential to produce one of the industry-leading augmented reality (AR) smart glasses, but there are still many challenges in the design, scaling, and reproducibility of these imprinted waveguides. A promising path toward mass manufacturing of optical waveguide combiners is via large-area nanoimprinting. Here, we present the complete value chain with partners involved throughout the process: from design, mastering, and materials to imprinting and metrology, to prove that this method improves not only the manufacturing throughput but also the waveguide quality. We demonstrate that the replication and image quality are true to the intended design using large area, high refractive index (n = 1.9), square (300 mm × 300 mm) glass substrates with high-refractive index resins (n = 1.9). This is shown to be valid for over 100 replications and for large area nanoimprinting (Gen5, 1100 mm × 1300 mm). Our goal is to demonstrate a viable path toward high-volume and low-cost manufacturing of AR waveguides based on surface relief gratings.
Nanoimprinting of surface-relief grating-based waveguides has the potential to result in the best performing Augmented Reality (AR) smart glasses, but there are still many challenges in the design, scaling, and reproducibility of these imprinted waveguides. We presented a promising path toward mass manufacturing of optical waveguide combiners via large-area nanoimprinting at SPIE AR/VR/MR 2022. This alternative route for manufacturing surface-relief gratings on a larger area generated much interest. This follow-up paper presents a further optimized design based on the lessons learned from the previous paper, with a particular focus on quality. The complete value chain with partners is involved throughout the process of this iterative update: from design, mastering, and materials to imprinting and metrology, to prove that this method improves not only the manufacturing throughput but also the waveguide quality. We demonstrate that both the replication and image quality is true to the intended design using large area, high refractive index (1.9 RI), square (300 x 300mm) glass substrates with high refractive index resins (1.9 RI). Our objective is to further establish this new approach towards high-volume and low-cost manufacturing of waveguides based on surface relief gratings as a viable path forward for enabling the Metaverse.
A promising path towards consumer electronics-ready manufacturing of optical waveguide combiners is via large-area nanoimprinted surface relief gratings on high index glass substrates. Presently, this is realized through equipment and substrates based on wafer format (up to 12-inch). In this work, we present a way to produce waveguides with surface relief gratings utilizing the entire value chain from design to mastering to replication on panel-level nanoimprint equipment using rectangular high refractive index glass substrates and high refractive index resins. This is demonstrated on a greater than Gen 3 panel size (550 mm x 650 mm). The fabricated waveguides are optically tested to validate the design and the value chain. We demonstrate that the quality of the large area imprints is similar to present wafer-level imprints. Thus, we introduce a new approach towards high volume and low-cost manufacturing of waveguides based on surface relief gratings.
Waveguide technology is widely believed to constitute the most promising approach to realize affordable and fully immersive Augmented Reality (AR) / Mixed Reality (MR) devices. For all major technology platforms (diffractive, reflective, or holographic), specialty grade high index optical glass is the central component to achieve some of the key features of AR devices, such as field of view, MTF, or weight. We will provide insights into SCHOTT’s roadmap for dedicated glass development for the AR sector and discuss the latest achievement with high relevance for the industry. It is a game of trade-offs between the desired properties to produce an optical glass which enables the entry of AR devices into the consumer market.
Waveguide technology is widely believed to constitute the most promising approach to realize affordable and fully immersive Augmented Reality (AR) / Mixed Reality (MR) devices. For all major technology platforms (diffractive, reflective, or holographic), specialty grade high index optical glass is the central component to achieve some of the key features of AR devices, such as field of view, MTF, or weight. We will provide insights into SCHOTT’s roadmap for dedicated glass development for the AR sector and discuss the latest achievement with high relevance for the industry. It is a game of trade-offs between the desired properties to produce an optical glass which enables the entry of AR devices into the consumer market.
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