Dr. Gary X. Cao Profile

Dr. Gary X. Cao

Staff Process Engineer at Grand Canyon University

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Publications (2)

Proceedings Article | 24 May 2004 Paper

193-nm resist shrinkage carryover effect to a post-etch layer due to CD-SEM measurement

Gary Cao, Nancy Wheeler, Alan Wong

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533881

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers, Metrology, Optical lithography, Image processing, Etching, Inspection, Photoresist processing, Optical testing

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Proceedings Article | 23 August 2000 Paper

Technique of electrical beam treatment leading to an accurate and reliable critical dimension metrology measurement on a postetch layer

Gary Cao, Nancy Wheeler, Alan Wong

Proceedings Volume 4182, (2000) https://doi.org/10.1117/12.410064

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Detection and tracking algorithms, Image processing, Lithium, Interfaces, Metrology, Pattern recognition, Etching, Image resolution

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