Dr. Haiping Zhang
at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 4 December 2008 Paper
Aris Chen, Victor Huang, Sophie Chen, C. J. Tsai, Kenneth Wu, Haiping Zhang, Kevin Sun, Jason Saito, Henry Chen, Debbie Hu, Ming Li, William Shen, Uday Mahajan
Proceedings Volume 7140, 71400W (2008) https://doi.org/10.1117/12.804558
KEYWORDS: Semiconducting wafers, Inspection, Particles, Light scattering, Coating, Polishing, Scattering, Scanning electron microscopy, Crystals, Defect inspection

Proceedings Article | 26 March 2007 Paper
Katsushi Nakano, Hiroshi Kato, Tomoharu Fujiwara, K. Shiraishi, Yasuhiro Iriuchijima, Soichi Owa, Irfan Malik, Steve Woodman, Prasad Terala, Christine Pelissier, Haiping Zhang
Proceedings Volume 6520, 652016 (2007) https://doi.org/10.1117/12.711464
KEYWORDS: Semiconducting wafers, Particles, Immersion lithography, Inspection, Wafer inspection, Bridges, Photoresist processing, Optical lithography, Calibration, Defect inspection

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