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Haruki Nakayama
at Univ of Aizu
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Publications (1)
Proceedings Article | 21 November 2023 Poster + Paper
A formulation of mask optimization into QUBO model for Ising machines
Yukihide Kohira, Haruki Nakayama, Naoki Nonaka, Tomomi Matsui, Atsushi Takahashi, Chikaaki Kodama
Proceedings Volume 12751, 127511D (2023) https://doi.org/10.1117/12.2687615
KEYWORDS: Source mask optimization, Tolerancing, Optical proximity correction, Semiconducting wafers, SRAF, Quantum annealing
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