Dr. Hiroshi Hiroshima Profile

Dr. Hiroshi Hiroshima

at National Institute of Advanced Industrial Science and Technology

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Author

Publications (2)

Proceedings Article | 9 April 2024 Poster + Paper

Open/short-TEG evaluation of 24nm-half-pitch-W damascene interconnects based on nanoimprint lithography

Kenta Suzuki, Tetsuya Ueda, Hiroshi Hiroshima, Yoshihiro Hayashi, Masaki Ishida, Tomomi Funayoshi, Hiromi Hiura, Noriyasu Hasegawa, Kiyohito Yamamoto

Proceedings Volume 12956, 129560W (2024) https://doi.org/10.1117/12.3008538

KEYWORDS: Nanoimprint lithography, Capacitors, Semiconducting wafers, Optical lithography, Fabrication, Image processing, Scanning electron microscopy, Chemical mechanical planarization, Back end of line, Tungsten

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Proceedings Article | 29 September 2023 Paper

Ultra-high throughput electron beam lithography for wafer size nanoimprint mold fabrication

Takaomi Ito, Takumi Watanabe, Satoshi Nagai, Sung-won Youn, Kenta Suzuki, Hiroshi Hiroshima

Proceedings Volume 12915, 1291507 (2023) https://doi.org/10.1117/12.2684952

KEYWORDS: Electron beam lithography, Nanoimprint lithography, Semiconducting wafers, Silicon, Fabrication, Scanning electron microscopy, Distortion, Nanolithography, Color, Vestigial sideband modulation

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