Dr. Hongyan H. Shang Profile

Dr. Hongyan H. Shang

Instructor at Shanghai Maritime Univ

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Author

Publications (5)

Proceedings Article | 13 October 2008 Paper

Study of x-ray lithography mask distortion during electron-beam writing

Hongyan Shang, Yongkun Wang

Proceedings Volume 7129, 712909 (2008) https://doi.org/10.1117/12.807384

KEYWORDS: Distortion, Photomasks, Electron beams, X-ray lithography, Finite element methods, X-rays, Silicon, Semiconducting wafers, 3D modeling, Heat flux

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Proceedings Article | 10 October 2008 Paper

Transient response characteristics of position sensitive detector irradiated by moving light source

Hongyan Shang

Proceedings Volume 7129, 712904 (2008) https://doi.org/10.1117/12.807371

KEYWORDS: Light sources, Sensors, Time metrology, Light, Computer simulations, Electrodes, Technetium, Thulium, Mathematical modeling, Error analysis

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Proceedings Article | 6 November 2006 Paper

Research of the impact of slanting installation error of PSD on spot position

Hongyan Shang, Guangjun Zhang, Zhenzhong Wei, Yongkun Wang

Proceedings Volume 6357, 63573J (2006) https://doi.org/10.1117/12.717241

KEYWORDS: Distortion, Gaussian beams, Error analysis, Optical simulations, Sensors, Superposition, Astronomical engineering, Mathematical modeling, Laser development, Charge-coupled devices

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Proceedings Article | 6 November 2006 Paper

Study of the thermal characteristic of x-ray mask during short-pulsed exposure

Hongyan Shang, Yongkun Wang

Proceedings Volume 6357, 63573M (2006) https://doi.org/10.1117/12.717246

KEYWORDS: X-rays, Absorption, 3D modeling, Temperature metrology, Finite element methods, Distortion, Gold, Photomasks, X-ray technology, Thermal modeling

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Proceedings Article | 28 October 2006 Paper

Dynamic position detection characteristics of one-dimensional position sensitive detector

Hongyan Shang, Ying Wang

Proceedings Volume 6358, 635801 (2006) https://doi.org/10.1117/12.717475

KEYWORDS: Light sources, Sensors, Mathematical modeling, Electrodes, Resistance, Information operations, Light, Mathematics, Automatic control, Capacitance

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