Mr. Hsiao-Chiang Lin Profile

Hsiao-Chiang Lin

at Powerchip Semiconductor Manufacturing Corp

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Publications (2)

Proceedings Article | 2 April 2014 Paper

Across wafer CD uniformity optimization by wafer film scheme at double patterning lithography process

Hsiao-Chiang Lin, Yang-Liang Li, Shiuan-Chuan Wang, Chien-Hung Liu, Zih-Song Wang, Jhung-Yuin Hsuh

Proceedings Volume 9050, 905026 (2014) https://doi.org/10.1117/12.2045875

KEYWORDS: Semiconducting wafers, Double patterning technology, Scanners, Lithography, Critical dimension metrology, Optical lithography, Carbon, Thin films, Photomasks, Lithium

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Proceedings Article | 24 March 2009 Paper

Fast analysis and diagnostics for improving overlay control: moving beyond the black box approach

Yi-An Liu, Wei-Ming Wu, Hsiao-Chiang Lin, Jun-Cheng (Nelson) Lai, Chin-Chou (Kevin) Huang, Hsing-Chien (Robert) Wu, Healthy Huang, David Tien

Proceedings Volume 7272, 72722Z (2009) https://doi.org/10.1117/12.812478

KEYWORDS: Overlay metrology, Semiconducting wafers, Scanners, Error analysis, Reticles, Control systems, Diagnostics, Process control, Metrology, Process engineering

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