Dr. Ivan Maximov Profile

Dr. Ivan Maximov

at Lund Univ

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Author

Publications (4)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Sequential infiltration synthesis and pattern transfer using 6 nm half-pitch carbohydrate-based fingerprint block copolymer

Anette Löfstrand, Reza Jafari Jam, Muhammad Mumtaz, Karolina Mothander, Tommy Nylander, Alexei Vorobiev, Ahibur Rahaman, Wen-Chang Chen, Redouane Borsali, Ivan Maximov

Proceedings Volume 11612, 116120W (2021) https://doi.org/10.1117/12.2583803

KEYWORDS: Silicon, Reactive ion etching, Plasma, Optical lithography, FT-IR spectroscopy, Etching, Scanning electron microscopy, Reflectometry, Reflectance spectroscopy, Polymers

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Proceedings Article | 11 June 2003 Paper

Metal nanoelectrodes for molecular transistor and investigation of electron transport in molecular systems

D. Suyatin, E. Soldatov, Ivan Maximov, Lars Montelius, Lars Samuelson, G. Khomutov, S. Gubin, A. Sergeev-Cherenkov

Proceedings Volume 5023, (2003) https://doi.org/10.1117/12.514284

KEYWORDS: Molecules, Molecular electronics, Electrodes, Electron transport, Resistance, Metals, Transistors, Nanostructures, Scanning electron microscopy, Physics

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Proceedings Article | 21 July 2000 Paper

Large-area nanoimprint fabrication of sub-100-nm interdigitated metal arrays

Lars Montelius, Babak Heidari, Mariusz Graczyk, Torbjoern Ling, Ivan Maximov, Eva-Lena Sarwe

Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390081

KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Metals, Polymethylmethacrylate, Nanolithography, Lithography, Reactive ion etching, Etching, Sensors, Nanostructures

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Proceedings Article | 2 September 1992 Paper

Fabrication and imaging of quantum-well wire structures

Lars Samuelson, Kristina Georgsson, Anders Gustafsson, Ivan Maximov, Lars Montelius, Stefan Nilsson, Werner Seifert, Allen Semu

Proceedings Volume 1676, (1992) https://doi.org/10.1117/12.137655

KEYWORDS: Quantum wells, Wet etching, Etching, Polymethylmethacrylate, Scanning electron microscopy, Electron beam lithography, Excitons, Luminescence, Gallium arsenide, Dry etching

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