Mr. Jaehyung Kim Profile

Jaehyung Kim

at SAMSUNG Electronics Co Ltd

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Gilwoo Song, Dooho Kang, Sungchai Kim, Sungwon Park, Taeyong Jo, Euiseok Kum, Jonghyun Lee, Dooho Park, Dongmin Kim, Sungwoon Uh, Jaehyung Kim

Proceedings Volume 12496, 124963N (2023) https://doi.org/10.1117/12.2670089

KEYWORDS: Deformation, Semiconducting wafers, Overlay metrology, Control systems, Optical alignment, Lithography, Machine learning

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Keywords/Phrases