Dr. James M. Powers Profile

Dr. James M. Powers

Principle Investigator at Intel Corp

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Publications (2)

Proceedings Article | 12 June 2003 Paper

Intel benchmarking and process integration of 157-nm resists

James Powers, Jeanette Roberts, Paul Zimmerman, Robert Meagley, E. Steve Putna, Uday Shah

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.483730

KEYWORDS: Etching, Silicon, Line width roughness, Dry etching, Absorbance, Photoresist materials, Imaging systems, Electroluminescence, Optical lithography, Lithography

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Proceedings Article | 11 July 2001 Paper

Property measurements on piezoelectric single crystals and the implications for transducer design

James Powers, Dwight Viehland, Lynn Ewart

Proceedings Volume 4333, (2001) https://doi.org/10.1117/12.432739

KEYWORDS: Crystals, Transducers, Ceramics, Lead, Ferroelectric materials, Niobium, Amplifiers, Magnesium, Actuators, Dielectrics

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